Publications by authors named "Antti Rahtu"

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Reaction mechanism studies on atomic layer deposition of Nb2O5 from Nb(OEt)5 and water.
Kjell Knapas, Antti Rahtu, Mikko Ritala

Langmuir· January 2010

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In situ quadrupole mass spectrometry study of atomic-layer deposition of ZrO2 using Cp2Zr(CH3)2 and water.
Jaakko Niinistö, Antti Rahtu, Matti Putkonen, Mikko Ritala, Markku Leskelä

Langmuir· August 2005

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In situ reaction mechanism studies on the atomic layer deposition of Al2O3 from (CH3)2AlCl and water.
Raija Matero, Antti Rahtu, Mikko Ritala

Langmuir· April 2005

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Synthesis and characterization of volatile, thermally stable, reactive transition metal amidinates.
Booyong S Lim, Antti Rahtu, Jin-Seong Park, Roy G Gordon

Inorg Chem· December 2003

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Atomic layer deposition of transition metals.
Booyong S Lim, Antti Rahtu, Roy G Gordon

Nat Mater· November 2003

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