Publications by authors named "Austin M Cano"

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Thermal Atomic Layer Etching of SiO by a "Conversion-Etch" Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride.
Jaime W DuMont, Amy E Marquardt, Austin M Cano, Steven M George

ACS Appl Mater Interfacesยท March 2017

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