Publications by authors named "C Tarrio"

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Evidence Against Carbonization of the Thin-Film Filters of the onboard the .
Charles Tarrio, Robert F Berg, Thomas B Lucatorto, Francis G Eparvier, Andrew R Jones

Sol Phys· January 2021

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EUV-induced carbon growth at contaminant pressures between 10 mbar and 10 mbar: Experiment and model.
S B Hill, C Tarrio, R F Berg, T B Lucatorto

J Vac Sci Technol A· December 2020

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Note: Thermally stable thin-film filters for high-power extreme-ultraviolet applications.
C Tarrio, R F Berg, T B Lucatorto, B Lairson, H Lopez

Rev Sci Instrum· November 2015

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A synchrotron beamline for extreme-ultraviolet photoresist testing.
C Tarrio, S Grantham, S B Hill, N S Faradzhev, L J Richter

Rev Sci Instrum· July 2011

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Transmission grating based extreme ultraviolet imaging spectrometer for time and space resolved impurity measurements.
Deepak Kumar, Dan Stutman, Kevin Tritz, Michael Finkenthal, Charles Tarrio

Rev Sci Instrum· October 2010

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