Publications by authors named "Christos Messinis"

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Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology.
Tamar van Gardingen-Cromwijk, Manashee Adhikary, Christos Messinis, Sander Konijnenberg, Wim Coene

Opt Express· January 2023

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Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology.
Christos Messinis, Theodorus T M van Schaijk, Nitesh Pandey, Armand Koolen, Ilan Shlesinger

Opt Express· November 2021

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Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms.
Christos Messinis, Theodorus T M van Schaijk, Nitesh Pandey, Vasco T Tenner, Stefan Witte

Opt Express· December 2020

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Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons.
Christos Messinis, Vasco T Tenner, Johannes F De Boer, Stefan Witte, Arie den Boef

Appl Opt· April 2020

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