Publications by authors named "Declan P Casey"

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Methods for latent image simulations in photolithography with a polychromatic light attenuation equation for fabricating VIAs in 2.5D and 3D advanced packaging architectures.
Daniel C Smallwood, Paul McCloskey, Cian O'Mathuna, Declan P Casey, James F Rohan

Microsyst Nanoengยท May 2021

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