Publications by authors named "GeonHo Baek"

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Synthesis of low-k SiONC thin films by plasma-assisted molecular layer deposition with tetraisocyanatesilane and phloroglucinol.
Gi-Beom Park, Hae Lin Yang, Ji Min Kim, Hyolim Jung, GeonHo Baek

Nanotechnology· July 2024

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Facile synthesis of an organic/inorganic hybrid 2D structure tincone film by molecular layer deposition.
GeonHo Baek, Seunghwan Lee, Hye-Mi Kim, Su Hwan Choi, Jin-Seong Park

Dalton Trans· February 2022

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Dry-Etchable Molecular Layer-Deposited Inhibitor Using Annealed Indicone Film for Nanoscale Area-Selective Deposition.
Seunghwan Lee, Hye-Mi Kim, GeonHo Baek, Jin-Seong Park

ACS Appl Mater Interfaces· December 2021

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Facile rearrangement of molecular layer deposited metalcone thin films by electron beam irradiation for area selective atomic layer deposition.
Seunghwan Lee, GeonHo Baek, Hye-Mi Kim, Yong-Hwan Kim, Jin-Seong Park

Dalton Trans· July 2021

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Thermal Annealing of Molecular Layer-Deposited Indicone Toward Area-Selective Atomic Layer Deposition.
Seunghwan Lee, Miso Kim, GeonHo Baek, Hye-Mi Kim, Tran Thi Ngoc Van

ACS Appl Mater Interfaces· September 2020

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