Publications by authors named "Gregory Denbeaux"

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Synthesis of End-Cap Enabled Self-Immolative Photoresists For Extreme Ultraviolet Lithography.
Jingyuan Deng, Sean Bailey, Ruiwen Ai, Anthony Delmonico, Gregory Denbeaux

ACS Macro Lett· September 2022

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20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures [corrected].
Weilun Chao, Erik Anderson, Gregory P Denbeaux, Bruce Harteneck, J Alexander Liddle

Opt Lett· November 2003

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