Publications by authors named "Han-sun Cha"

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Carbon contamination analysis and its effect on extreme ultra violet mask imaging performance using coherent scattering microscopy/in-situ accelerated contamination system.
Chang Young Jeong, Sangsul Lee, Jong Gul Doh, Jae Uk Lee, Han-sun Cha

J Nanosci Nanotechnolยท July 2011

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