Publications by authors named "In Young Bang"

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Necking Reduction at Low Temperature in Aspect Ratio Etching of SiO at CF/H/Ar Plasma.
Hee-Tae Kwon, In-Young Bang, Jae-Hyeon Kim, Hyeon-Jo Kim, Seong-Yong Lim

Nanomaterials (Basel)· January 2024

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Measurement of re-entry plasma density using microwave reflectometer in laboratory.
Gi Won Shin, Jae Hyeon Kim, Sun Hee Lee, In Young Bang, Ji Hwan Kim

Rev Sci Instrum· October 2022

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Silicon Oxide Etching Process of NF and FNO Plasmas with a Residual Gas Analyzer.
Woo-Jae Kim, In-Young Bang, Ji-Hwan Kim, Yeon-Soo Park, Hee-Tae Kwon

Materials (Basel)· June 2021

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