Publications by authors named "J Provine"

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New avenues for residual stress analysis in ultrathin atomic layer deposited free-standing membranes through release of micro-cantilevers.
S Burgmann, M J Lid, H J D Johnsen, N P Vedvik, B Haugen, J Provine

Heliyon· February 2024

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ALD HfO Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications.
Charmaine Chia, Max M Shulaker, J Provine, Stefanie S Jeffrey, Roger T Howe

ACS Appl Mater Interfaces· July 2019

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Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition.
Hyo Jin K Kim, Kirsten E Kaplan, Peter Schindler, Shicheng Xu, Martin M Winterkorn, J Provine

ACS Appl Mater Interfaces· March 2019

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Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops.
Timothy S English, J Provine, Ann F Marshall, Ai Leen Koh, Thomas W Kenny

Ultramicroscopy· July 2016

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Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid.
Yongmin Kim, J Provine, Stephen P Walch, Joonsuk Park, Witchukorn Phuthong

ACS Appl Mater Interfaces· July 2016

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