Publications by authors named "Jan Biller"

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Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography.
Haoyan Lu, Michal Odstrčil, Charles Pooley, Jan Biller, Mikheil Mebonia

Ultramicroscopy· July 2023

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Computational proximity lithography with extreme ultraviolet radiation.
Valerie Deuter, Maciej Grochowicz, Sascha Brose, Jan Biller, Serhiy Danylyuk

Opt Express· August 2020

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