Publications by authors named "Jiani Su"

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Analytical model of excimer laser homogenizer using dual-microlens arrays.
Zhiyuan Shen, Yuejing Qi, Shuman Yang, Jiani Su, Jing Ma

Opt Express· December 2025

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Investigation and Application of Key Alignment Parameters for Overlay Accuracy in 3D Structures.
Miao Jiang, Mingyi Yao, Ganlin Song, Yuxing Zhou, Jiani Su

Micromachines (Basel)· July 2025

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