Publications by authors named "Lutz Ehrig"

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The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers.
Bert Kaiser, Hermann A G Schenk, Lutz Ehrig, Franziska Wall, Jorge M Monsalve

Microsyst Nanoeng· November 2022

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Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers.
Bert Kaiser, Sergiu Langa, Lutz Ehrig, Michael Stolz, Hermann Schenk

Microsyst Nanoeng· October 2019

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