Publications by authors named "Marcel Melzer"

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Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors.
Chris Stoeckel, Katja Meinel, Marcel Melzer, Agnė Žukauskaitė, Sven Zimmermann

Micromachines (Basel)· April 2022

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2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke

Sensors (Basel)· November 2020

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