Publications by authors named "P Mulgrew"

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Mask technologies for soft-x-ray projection lithography at 13 nm.
D M Tennant, L A Fetter, L R Harriott, A A Macdowell, P P Mulgrew

Appl Opt· December 1993

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Characterization of AZ PN114 resist for soft-x-ray projection lithography.
K Early, D M Tennant, D Y Jeon, P P Mulgrew, A A Macdowell

Appl Opt· December 1993

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Soft-x-ray projection imaging with a 1:1 ring-field optic.
A A Macdowell, J E Bjorkholm, K Early, R R Freeman, M D Himel, P P Mulgrew

Appl Opt· December 1993

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Design and fabrication of high-efficiency beam splitters and beam deflectors for integrated planar micro-optic systems.
S J Walker, J Jahns, L Li, W M Mansfield, P Mulgrew

Appl Opt· May 1993

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Pharmacy and the kidney patient.
M Mawhinney, A McMullan, P Mulgrew

Health Serv J· August 1989

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