Publications by authors named "R Chanson"

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Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control.
R Chanson, F Miserque, F Schuster, F Rouillard

Sci Rep· November 2025

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Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50 °C.
R Chanson, L Zhang, S Naumov, Yu A Mankelevich, T Tillocher

Sci Rep· January 2018

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