Publications by authors named "Sebastian U Engelmann"

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Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication.
Hsinyu Tsai, Jed W Pitera, Hiroyuki Miyazoe, Sarunya Bangsaruntip, Sebastian U Engelmann

ACS Nanoยท May 2014

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