Publications by authors named "Shibesh Dutta"

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3ω correction method for eliminating resistance measurement error due to Joule heating.
Benny Guralnik, Ole Hansen, Henrik H Henrichsen, Braulio Beltrán-Pitarch, Frederik W Østerberg, Shibesh Dutta

Rev Sci Instrum· September 2021

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Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper.
Liang Gong Wen, Philippe Roussel, Olalla Varela Pedreira, Basoene Briggs, Benjamin Groven, Shibesh Dutta

ACS Appl Mater Interfaces· October 2016

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Nanotube substituted source/drain regions for carbon nanotube transistors for VLSI circuits.
Shibesh Dutta, Balakrishnan Shankar

J Nanosci Nanotechnol· December 2011

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