Publications by authors named "Stefan Decoster"

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High-Density Patterning of InGaZnO by CH: a Comparative Study of RIE and Pulsed Plasma ALE.
Shreya Kundu, Stefan Decoster, Philippe Bezard, Ankit Nalin Mehta, Harold Dekkers

ACS Appl Mater Interfacesยท July 2022

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