Publications by authors named "Steffen Marschmeyer"

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Monolithic electro-optic platform on silicon with bandwidth of 100 GHz and beyond.
Daniel Steckler, Stefan Lischke, Yuji Yamamoto, Wei-Chen Wen, Anna Peczek, Steffen Marschmeyer

Nat Commun· November 2025

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Reflectometric method for measuring residual oxides in through-silicon vias for 3D chip integration.
Joachim Bauer, Friedhelm Heinrich, Francesco Villasmunta, Claus Villringer, Johanna Reck, Steffen Marschmeyer

Opt Express· July 2025

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A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias.
Marco Lisker, Steffen Marschmeyer, Mehmet Kaynak, Ibrahim Tekin

J Nanosci Nanotechnol· September 2011

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