Publications by authors named "Stephan Beurthey"

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Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices.
Sylwester Bargiel, Julien Cogan, Samuel Queste, Stefania Oliveri, Ludovic Gauthier-Manuel, Stéphan Beurthey

Micromachines (Basel)· June 2023

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Short-Pulse Laser-Assisted Fabrication of a Si-SiO Microcooling Device.
Alexandros Mouskeftaras, Stephan Beurthey, Julien Cogan, Gregory Hallewell, Olivier Leroy

Micromachines (Basel)· August 2021

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