Publications by authors named "Sungyool Kwon"

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Effects of He/H₂ Plasma Treatment on Properties of SiCOH Films Deposited with the 1,1,1,3,5,7,7,7- Octamethyl-3,5-Bis(Trimethylsiloxy) Tetrasiloxane Precursor.
Yoonsoo Park, Hyuna Lim, Sungyool Kwon, Younghyun Kim, Wonjin Ban

J Nanosci Nanotechnol· November 2020

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Low- SiCOH Films Deposited with a Single Precursor 1,1,1,3,5,7,7,7 Octamethyl-3,5-Bis(trimethylsiloxy) Tetrasiloxane by Plasma Enhanced Chemical Vapor Deposition.
Sungyool Kwon, Yoonsoo Park, Wonjin Ban, Younghyun Kim, Junyoung Jang

J Nanosci Nanotechnol· April 2020

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Relation of Dielectric Constants and Chemical Structures of Low Dielectric Constant SiCOH Films Deposited by Using Octamethylcyclotetrasiloxane and Tetraethylorthosilicate Precursors.
Yoonsoo Park, Sungyool Kwon, Wonjin Ban, Hyuna Lim, Donggeun Jung

J Nanosci Nanotechnol· October 2019

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