Publications by authors named "Taian Fan"

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Rect-SRAF method in inverse lithography technology.
Fei Ai, Xiaojing Su, Lisong Dong, Taian Fan, Jiashuo Wang

Opt Express· July 2025

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Dynamic budget analysis of multiple parameters in a lithography system based on the superposition of light intensity fluctuations.
Jiashuo Wang, Xiaojing Su, Lisong Dong, Taian Fan, Yayi Wei

Opt Express· February 2024

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Three-dimensional plasmonic lithography imaging modeling based on the RCWA algorithm for computational lithography.
Huwen Ding, Taian Fan, Libin Zhang, Yayi Wei, Tianchun Ye

Opt Express· October 2023

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Study on forbidden pitch in plasmonic lithography: taking 365 nm wavelength thin silver film-based superlens imaging lithography as an example.
Huwen Ding, Lihong Liu, Lisong Dong, Dandan Han, Taian Fan

Opt Express· September 2022

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Fast aerial image model for EUV lithography using the adjoint fully convolutional network.
Jiaxin Lin, Lisong Dong, Taian Fan, Xu Ma, Yayi Wei

Opt Express· March 2022

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Fast extreme ultraviolet lithography mask near-field calculation method based on machine learning.
Jiaxin Lin, Lisong Dong, Taian Fan, Xu Ma, Rui Chen

Appl Opt· March 2020

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Learning-based compressive sensing method for EUV lithographic source optimization.
Jiaxin Lin, Lisong Dong, Taian Fan, Xu Ma, Yayi Wei

Opt Express· August 2019

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Mitigating the influence of wafer topography on the implantation process in optical lithography.
Lisong Dong, Wenhui Chen, Taian Fan, Xiaojing Su, Yayi Wei

Opt Lett· August 2017

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