Publications by authors named "Thomas Modes"

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High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.
Stephan Barth, Tom Schreiber, Steffen Cornelius, Olaf Zywitzki, Thomas Modes

Micromachines (Basel)ยท September 2022

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