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Publications by authors named "Valery Felmetsger"

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Homogeneity and Thermal Stability of Sputtered AlScN Thin Films.
José Manuel Carmona-Cejas, Teona Mirea, Jesús Nieto, Jimena Olivares, Valery Felmetsger

Materials (Basel)· March 2023


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AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators.
Chih-Ming Lin, Yung-Yu Chen, Valery V Felmetsger, Debbie G Senesky, Albert P Pisano

Adv Mater· May 2012


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Temperature-compensated aluminum nitride lamb wave resonators.
Chih-Ming Lin, Ting-Ta Yen, Yun-Ju Lai, Valery V Felmetsger, Matthew A Hopcroft

IEEE Trans Ultrason Ferroelectr Freq Control· March 2010


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