Publications by authors named "Yunil Cho"

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Low- SiO/AlO Nanolaminate Dielectric on Dielectric Achieved by Hybrid Pulsed Chemical Vapor Deposition.
James Huang, Jing Mu, Yunil Cho, Charles Winter, Victor Wang

ACS Appl Mater Interfaces· December 2023

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Dielectric-on-Dielectric Achieved on SiO in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation.
James Huang, Yunil Cho, Victor Wang, Zichen Zhang, Jing Mu

ACS Appl Mater Interfaces· May 2023

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Selective Pulsed Chemical Vapor Deposition of Water-Free TiO/AlO and HfO/AlO Nanolaminates on Si and SiO in Preference to SiCOH.
James Huang, Yunil Cho, Zichen Zhang, Antony Jan, Keith T Wong

ACS Appl Mater Interfaces· April 2022

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