Publications by authors named "Bernd Bodermann"

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Spectroscopic Ellipsometry of Plasmonic Gratings-Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty.
Deshabrato Mukherjee, Sven Burger, Thomas Siefke, Jeetendra Gour, Bernd Bodermann

ACS Omega· April 2025

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In situ, back-focal-plane-based determination of the numerical apertures in optical microscopes.
Jan Krüger, Detlef Bergmann, Rainer Köning, Bernd Bodermann, Eberhard Manske

Appl Opt· January 2023

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Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers.
Thomas Siefke, Carol B Rojas Hurtado, Johannes Dickmann, Walter Dickmann, Tim Käseberg, Bernd Bodermann

Opt Express· August 2020

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Some aspects on the uncertainty calculation in Mueller ellipsometry.
Matthias Wurm, Tobias Grunewald, Sven Teichert, Bernd Bodermann, Johanna Reck

Opt Express· March 2020

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Using DNA origami nanorulers as traceable distance measurement standards and nanoscopic benchmark structures.
Mario Raab, Ija Jusuk, Julia Molle, Egbert Buhr, Bernd Bodermann

Sci Rep· January 2018

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Metrology of nanoscale grating structures by UV scatterometry.
Matthias Wurm, Johannes Endres, Jürgen Probst, Max Schoengen, Alexander Diener, Bernd Bodermann

Opt Express· February 2017

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A new flexible scatterometer for critical dimension metrology.
Matthias Wurm, Frank Pilarski, Bernd Bodermann

Rev Sci Instrum· February 2010

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