Publications by authors named "Bryan M Barnes"

Claim this Profile
D
Data-driven approaches to optical patterned defect detection.
Mark-Alexander Henn, Hui Zhou, Bryan M Barnes

OSA Contin· September 2019

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
D
Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy.
Martin Y Sohn, Bryan M Barnes, Richard M Silver

Optik (Stuttg)· March 2018

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
E
Evaluating the Effects of Modeling Errors for Isolated Finite 3D Targets.
Mark-Alexander Henn, Bryan M Barnes, Hui Zhou

J Micro Nanolithogr MEMS MOEMS· January 2017

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
C
Combining model-based measurement results of critical dimensions from multiple tools.
Nien Fan Zhang, Bryan M Barnes, Hui Zhou, Mark-A Henn, Richard M Silver

Meas Sci Technol· January 2017

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
O
Optimizing the nanoscale quantitative optical imaging of subfield scattering targets.
Mark-Alexander Henn, Bryan M Barnes, Hui Zhou, Martin Sohn, Richard M Silver

Opt Lett· November 2016

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
D
Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization.
Jing Qin, Richard M Silver, Bryan M Barnes, Hui Zhou, Ronald G Dixson

Light Sci Appl· February 2016

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
O
Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.
Mark-Alexander Henn, Richard M Silver, John S Villarrubia, Nien Fan Zhang, Hui Zhou, Bryan M Barnes

J Micro Nanolithogr MEMS MOEMS· January 2015

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
T
Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy.
Bryan M Barnes, Martin Y Sohn, Francois Goasmat, Hui Zhou, András E Vladár

Opt Express· November 2013

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
F
Fourier domain optical tool normalization for quantitative parametric image reconstruction.
Jing Qin, Richard M Silver, Bryan M Barnes, Hui Zhou, Francois Goasmat

Appl Opt· September 2013

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
I
Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach.
Nien Fan Zhang, Richard M Silver, Hui Zhou, Bryan M Barnes

Appl Opt· September 2012

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
S
Scatterfield microscopy for extending the limits of image-based optical metrology.
Richard M Silver, Bryan M Barnes, Ravikiran Attota, Jay Jun, Michael Stocker

Appl Opt· July 2007

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis