Publications by authors named "Martin Y Sohn"

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Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy.
Yoon Sung Bae, Martin Y Sohn, Dong-Ryoung Lee, Sang-Soo Choi

Opt Express· October 2019

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Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy.
Martin Y Sohn, Bryan M Barnes, Richard M Silver

Optik (Stuttg)· March 2018

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Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy.
Bryan M Barnes, Martin Y Sohn, Francois Goasmat, Hui Zhou, András E Vladár

Opt Express· November 2013

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