Publications by authors named "Danilo de Simone"

Claim this Profile
M
Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV.
Roberto Fallica, Nicola Mahne, Thierry Conard, Anja Vanleenhove, Danilo de Simone

ACS Appl Mater Interfaces· July 2023

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
S
SIMS Analysis of Thin EUV Photoresist Films.
Valentina Spampinato, Alexis Franquet, Danilo De Simone, Ivan Pollentier, Alexander Pirkl

Anal Chem· February 2022

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
E
Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography.
Ashish Rathore, Maicol Cipriani, Ching-Chung Huang, Lionel Amiaud, Céline Dablemont, Danilo De Simone

Phys Chem Chem Phys· April 2021

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
D
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography.
Joren Severi, Danilo De Simone, Stefan De Gendt

Polymers (Basel)· December 2020

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis
M
Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation.
Juhae Park, Sung-Gyu Lee, Yannick Vesters, Joren Severi, Myungwoong Kim, Danilo De Simone

Polymers (Basel)· November 2019

Social Media Activity not collected for this article yet.

Sign Up to Request Social Media Analysis