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Publications by authors named "Roberto Fallica"

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Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings.
Ksenia Matveevskii, Konstantin V Nikolaev, Roberto Fallica, Detlef Beckers, Milen Gateshki

J Appl Crystallogr· October 2024


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Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV.
Roberto Fallica, Nicola Mahne, Thierry Conard, Anja Vanleenhove, Danilo de Simone

ACS Appl Mater Interfaces· July 2023


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Changes in the near edge x-ray absorption fine structure of hybrid organic-inorganic resists upon exposure.
Roberto Fallica, Benjamin Watts, Benedikt Rösner, Gioia Della Giustina, Laura Brigo

Nanotechnology· September 2018


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Metal organic chemical vapor deposition of phase change Ge1Sb2Te4 nanowires.
Massimo Longo, Roberto Fallica, Claudia Wiemer, Olivier Salicio, Marco Fanciulli

Nano Lett· March 2012


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