Publications by authors named "Hagen Bartzsch"

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High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.
Stephan Barth, Tom Schreiber, Steffen Cornelius, Olaf Zywitzki, Thomas Modes, Hagen Bartzsch

Micromachines (Basel)· September 2022

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Combined 'moth-eye' structured and graded index-layer anti-reflecting coating for high index glasses.
Matthias Kraus, Zhaolu Diao, Klaus Weishaupt, Joachim P Spatz, Kerstin Täschner, Hagen Bartzsch

Opt Express· November 2019

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Sputter deposition of stress-controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications.
Stephan Barth, Hagen Bartzsch, Daniel Gloess, Peter Frach, Thomas Herzog

IEEE Trans Ultrason Ferroelectr Freq Control· August 2014

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Sputter deposition of silicon oxynitride gradient and multilayer coatings.
Jörn Weber, Hagen Bartzsch, Peter Frach

Appl Opt· May 2008

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