Publications by authors named "Steven Letourneau"

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Thermal Atomic Layer Etching of MoS Using MoF and HO.
Jake Soares, Anil U Mane, Devika Choudhury, Steven Letourneau, Steven M Hues

Chem Mater· February 2023

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Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition.
Matthias J Young, Nicholas M Bedford, Angel Yanguas-Gil, Steven Letourneau, Matthew Coile

ACS Appl Mater Interfaces· May 2020

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