Publications by authors named "Steven M Hues"

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Achieving 0.05 Ω-mm contact resistance in non-alloyed Ti/Au ohmics to -GaO by removing surface carbon.
Naomi Pieczulewski, Kathleen T Smith, Corey M Efaw, Arjan Singh, Cameron A Gorsak, Steven M Hues

APL Mater· June 2025

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Thermal Atomic Layer Etching of MoS Using MoF and HO.
Jake Soares, Anil U Mane, Devika Choudhury, Steven Letourneau, Steven M Hues

Chem Mater· February 2023

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