Publications by authors named "Thomas Ahbe"

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Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements.
Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner, Uwe Brand

Sensors (Basel)· February 2022

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True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor.
Jan Thiesler, Thomas Ahbe, Rainer Tutsch, Gaoliang Dai

Sensors (Basel)· December 2021

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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Thomas Ahbe

Sensors (Basel)· March 2019

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