Publications by authors named "Vicky Philipsen"

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Study on Next-Generation EUV Lithography Technology: Hyper NA, the Highest Potential for Practical Implementation.
Inhwan Lee, Joern-Holger Franke, Vicky Philipsen, Kurt Ronse, Stefan De Gendt

ACS Appl Mater Interfaces· August 2025

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Exploring the optimal combination of Ru/Ta bilayer mask stacks and illumination source shapes to mitigate mask 3D effects at high-NA extreme ultraviolet lithography.
Devesh Thakare, Annelies Delabie, Vicky Philipsen

Opt Express· October 2024

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Nested Sampling aided determination of tantalum optical constants in the EUV spectral range.
Qais Saadeh, Philipp Naujok, Meiyi Wu, Vicky Philipsen, Devesh Thakare

Appl Opt· November 2022

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Determination of optical constants of thin films in the EUV.
Richard Ciesielski, Qais Saadeh, Vicky Philipsen, Karl Opsomer, Jean-Philippe Soulié

Appl Opt· March 2022

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Resonance and nonresonant laser ionization of sputtered uranium atoms from thin films and single microparticles: evaluation of a combined system for particle trace analysis.
Nicole Erdmann, Maria Betti, Felix Kollmer, Alfred Benninghoven, Carsten Grüning, Vicky Philipsen

Anal Chem· July 2003

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