Publications by authors named "Victor Soltwisch"

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Beyond the bulk: probing the EUV optical constants of nanoscale amorphous silicon films.
Samira Naghdi, Joachim Woitok, Atul Tiwari, H W Lokhorst, Victor Soltwisch

Opt Express· December 2025

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Characterization and discrimination of periodic nanostructures with scanning-free GEXRF.
Nils Wauschkuhn, Yves Kayser, Jonas Baumann, Johannes Degenhardt, Thomas Siefke, Victor Soltwisch

Nanotechnology· May 2025

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Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays.
Leonhard M Lohr, Richard Ciesielski, Vinh-Binh Truong, Victor Soltwisch

Nanoscale· March 2025

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Hybrid Metrology for Nanostructured Optical Metasurfaces.
Irdi Murataj, Angelo Angelini, Eleonora Cara, Samuele Porro, Burkhard Beckhoff, Victor Soltwisch

ACS Appl Mater Interfaces· December 2023

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Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation.
Leonhard M Lohr, Richard Ciesielski, Sven Glabisch, Sophia Schröder, Sascha Brose, Victor Soltwisch

Appl Opt· January 2023

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A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range.
Richard Ciesielski, Leonhard M Lohr, Analía Fernández Herrero, Andreas Fischer, Alexander Grothe, Victor Soltwisch

Rev Sci Instrum· January 2023

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Nested Sampling aided determination of tantalum optical constants in the EUV spectral range.
Qais Saadeh, Philipp Naujok, Meiyi Wu, Vicky Philipsen, Devesh Thakare, Victor Soltwisch

Appl Opt· November 2022

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Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces.
Dieter Skroblin, Analía Fernández Herrero, Thomas Siefke, Konstantin Nikolaev, Anna Andrle, Victor Soltwisch

Nanoscale· October 2022

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Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples.
Steffen Staeck, Anna Andrle, Philipp Hönicke, Jonas Baumann, Daniel Grötzsch, Victor Soltwisch

Nanomaterials (Basel)· October 2022

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Determination of optical constants of thin films in the EUV.
Richard Ciesielski, Qais Saadeh, Vicky Philipsen, Karl Opsomer, Jean-Philippe Soulié, Victor Soltwisch

Appl Opt· March 2022

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Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures.
Philipp Hönicke, Yves Kayser, Konstantin V Nikolaev, Victor Soltwisch, Jeroen E Scheerder

Small· February 2022

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Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering.
Analía Fernández Herrero, Mika Pflüger, Jana Puls, Frank Scholze, Victor Soltwisch

Opt Express· October 2021

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Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning.
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Victor Soltwisch

Nanomaterials (Basel)· June 2021

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Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures.
Philipp Hönicke, Anna Andrle, Yves Kayser, Konstantin V Nikolaev, Jürgen Probst, Victor Soltwisch

Nanotechnology· December 2020

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Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings.
Analía Fernández Herrero, Mika Pflüger, Jürgen Probst, Frank Scholze, Victor Soltwisch

Opt Express· October 2019

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Erratum: Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum.
Mika Pflüger, Victor Soltwisch, Jürgen Probst, Frank Scholze, Michael Krumrey

IUCrJ· July 2018

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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence.
Victor Soltwisch, Philipp Hönicke, Yves Kayser, Janis Eilbracht, Jürgen Probst

Nanoscale· March 2018

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Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams.
Mika Pflüger, Victor Soltwisch, Jürgen Probst, Frank Scholze, Michael Krumrey

IUCrJ· July 2017

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Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering.
Anton Haase, Victor Soltwisch, Stefan Braun, Christian Laubis, Frank Scholze

Opt Express· June 2017

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Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements.
Anton Haase, Saša Bajt, Philipp Hönicke, Victor Soltwisch, Frank Scholze

J Appl Crystallogr· December 2016

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Modeling and empirical characterization of the polarization response of off-plane reflection gratings.
Hannah Marlowe, Randall L McEntaffer, James H Tutt, Casey T DeRoo, Drew M Miles, Victor Soltwisch

Appl Opt· July 2016

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Role of dynamic effects in the characterization of multilayers by means of power spectral density.
Anton Haase, Victor Soltwisch, Christian Laubis, Frank Scholze

Appl Opt· May 2014

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