Publications by authors named "Yuhei Otaka"

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Kinetic study on heterogeneous nucleation and incubation period during chemical vapor deposition.
Kohei Shima, Yuhei Otaka, Noboru Sato, Yuichi Funato, Yasuyuki Fukushima

J Chem Phys· March 2023

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Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage.
Kohei Shima, Yuhei Otaka, Noboru Sato, Yuichi Funato, Yasuyuki Fukushima

ACS Appl Mater Interfaces· November 2021

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