Publications by authors named "Yuichi Funato"

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Kinetic study on heterogeneous nucleation and incubation period during chemical vapor deposition.
Kohei Shima, Yuhei Otaka, Noboru Sato, Yuichi Funato, Yasuyuki Fukushima

J Chem Phys· March 2023

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Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage.
Kohei Shima, Yuhei Otaka, Noboru Sato, Yuichi Funato, Yasuyuki Fukushima

ACS Appl Mater Interfaces· November 2021

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Porous Membranes as Sacrificial Layers Enabling Conformal Chemical Vapor Deposition Involving Multiple Film-Forming Species.
Kohei Shima, Yuichi Funato, Noboru Sato, Yasuyuki Fukushima, Takeshi Momose

ACS Appl Mater Interfaces· November 2020

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Gas-phase reaction mechanism in chemical dry etching using NF and remotely discharged NH/N mixture.
Akira Matsugi, Shiro Kubota, Yuichi Funato, Yutaka Miura, Kazuhiko Tonari

RSC Adv· August 2020

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