Publications by authors named "Eric A Joseph"

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Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/CF and Ar/CHF plasma.
Dominik Metzler, Chen Li, Sebastian Engelmann, Robert L Bruce, Eric A Joseph

J Chem Phys· February 2017

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Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules.
Chao Wang, Sung-Wook Nam, John M Cotte, Christopher V Jahnes, Evan G Colgan, Eric A Joseph

Nat Commun· January 2017

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Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication.
Hsinyu Tsai, Jed W Pitera, Hiroyuki Miyazoe, Sarunya Bangsaruntip, Sebastian U Engelmann, Eric A Joseph

ACS Nano· May 2014

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