Publications by authors named "Sebastian Engelmann"

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Sebastian Engelmann, Katharina Weiand

Ber Wiss· June 2024

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Experimental realization of deep-subwavelength confinement in dielectric optical resonators.
Shuren Hu, Marwan Khater, Rafael Salas-Montiel, Ernst Kratschmer, Sebastian Engelmann

Sci Adv· August 2018

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Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/CF and Ar/CHF plasma.
Dominik Metzler, Chen Li, Sebastian Engelmann, Robert L Bruce, Eric A Joseph

J Chem Phys· February 2017

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Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication.
Hsinyu Tsai, Jed W Pitera, Hiroyuki Miyazoe, Sarunya Bangsaruntip, Sebastian U Engelmann

ACS Nano· May 2014

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