Publications by authors named "GS Oehrlein"

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Characterization of Ultrathin Polymer Films Using p-Polarized ATR-FTIR and Its Comparison with XPS.
Pingshan Luan, Gottlieb S Oehrlein

Langmuir· March 2019

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Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/CF and Ar/CHF plasma.
Dominik Metzler, Chen Li, Sebastian Engelmann, Robert L Bruce, Eric A Joseph, Gottlieb S Oehrlein

J Chem Phys· February 2017

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Effect of the chamber wall on fluorocarbon-assisted atomic layer etching of SiO using cyclic Ar/CF plasma.
Masatoshi Kawakami, Dominik Metzler, Chen Li, Gottlieb S Oehrlein

J Vac Sci Technol A· July 2016

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Polystyrene as a model system to probe the impact of ambient gas chemistry on polymer surface modifications using remote atmospheric pressure plasma under well-controlled conditions.
Elliot A J Bartis, Pingshan Luan, Andrew J Knoll, Connor Hart, Joonil Seog, Gottlieb S Oehrlein

Biointerphases· June 2015

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Strain-induced quantum confinement of carriers due to extended defects in silicon.
H Weman, B Monemar, GS Oehrlein, SJ Jeng

Phys Rev B Condens Matter· August 1990

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Microscopic identification and electronic structure of a di-hydrogen-vacancy complex in silicon by optical detection of magnetic resonance.
WM Chen, OO Awadelkarim, B Monemar, JL Lindström, GS Oehrlein

Phys Rev Lett· June 1990

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Structure of the boron-hydrogen complex in crystalline silicon.
AD Marwick, GS Oehrlein, NM Johnson

Phys Rev B Condens Matter· September 1987

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