Publications by authors named "Yebin You"

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C
Characterization of SiO Plasma Etching with Perfluorocarbon (CF and CF) and Hydrofluorocarbon (CHF and CHF) Precursors for the Greenhouse Gas Emissions Reduction.
Minsu Choi, Youngseok Lee, Yebin You, Chulhee Cho, Wonnyoung Jeong, Youbin Seol, Shinjae You, Geun Young Yeom

Materials (Basel)· August 2023

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Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma.
Inho Seong, Sijun Kim, Minsu Choi, Woobeen Lee, Wonnyoung Jeong, Yebin You, Youngseok Lee, Youbin Seol, Shinjae You

Materials (Basel)· August 2023

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C
Contribution of Ion Energy and Flux on High-Aspect Ratio SiO Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/CF Plasma: Individual Ion Energy and Flux Controlled.
Wonnyoung Jeong, Sijun Kim, Youngseok Lee, Chulhee Cho, Inho Seong, Yebin You, Youbin Seol, Shinjae You

Materials (Basel)· May 2023

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O
On the Quenching of Electron Temperature in Inductively Coupled Plasma.
Inho Seong, Si-Jun Kim, Youngseok Lee, Chulhee Cho, Wonnyoung Jeong, Yebin You, Shinjae You

Materials (Basel)· April 2023

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D
Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method.
Chulhee Cho, Sijun Kim, Youngseok Lee, Inho Seong, Wonnyoung Jeong, Yebin You, Shinjae You

Materials (Basel)· March 2023

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C
Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma.
Inho Seong, Jinho Lee, Sijun Kim, Youngseok Lee, Chulhee Cho, Wonnyoung Jeong, Yebin You, Shinjae You

Nanomaterials (Basel)· November 2022

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C
Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing.
Youngseok Lee, Yebin You, Chulhee Cho, Sijun Kim, Jangjae Lee, Minyoung Kim, Youngjun You, ShinJae You

Micromachines (Basel)· October 2022

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Influence of Additive N on O Plasma Ashing Process in Inductively Coupled Plasma.
Ye-Bin You, Young-Seok Lee, Si-Jun Kim, Chul-Hee Cho, In-Ho Seong, Won-Nyoung Jeong, Shin-Jae You

Nanomaterials (Basel)· October 2022

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D
Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation.
Si-Jun Kim, In-Ho Seong, Young-Seok Lee, Chul-Hee Cho, Won-Nyoung Jeong, Ye-Bin You, Shin-Jae You

Sensors (Basel)· August 2022

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D
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath.
Inho Seong, Sijun Kim, Youngseok Lee, Chulhee Cho, Jangjae Lee, Wonnyoung Jeong, Yebin You, Shinjae You

Sensors (Basel)· August 2022

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R
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma.
Chulhee Cho, Sijun Kim, Youngseok Lee, Wonnyoung Jeong, Inho Seong, Yebin You, Shinjae You

Sensors (Basel)· August 2022

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D
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics.
Si-Jun Kim, Sang-Ho Lee, Ye-Bin You, Young-Seok Lee, In-Ho Seong, Shin-Jae You

Sensors (Basel)· July 2022

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